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The Use of Ion Implantation for Lifetime Control in Silicon Devices

Journal Solid State Phenomena (Volumes 1 - 2)
Volume Ion Implantation in Semiconductors
Edited by D. Stievenard and J.C. Bourgoin
Pages 177-185
DOI 10.4028/www.scientific.net/SSP.1-2.177
Citation A. Mogro-Campero, 1991, Solid State Phenomena, 1-2, 177
Authors A. Mogro-Campero
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