Paper Title:
Cross-Sectional Transmission Electron Microscope Study of Bf2+-Implanted (001) and (111) Silicon
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 1-2)
Edited by
D. Stievenard and J.C. Bourgoin
Pages
45-58
DOI
10.4028/www.scientific.net/SSP.1-2.45
Citation
L. J. Chen, C.W. Nieh, C. H. Chu, "Cross-Sectional Transmission Electron Microscope Study of Bf2+-Implanted (001) and (111) Silicon", Solid State Phenomena, Vols. 1-2, pp. 45-58, 1988
Online since
January 1991
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