Cross-Sectional Transmission Electron Microscope Study of Bf2+-Implanted (001) and (111) Silicon |
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| Journal | Solid State Phenomena (Volumes 1 - 2) |
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| Volume | Ion Implantation in Semiconductors |
| Edited by | D. Stievenard and J.C. Bourgoin |
| Pages | 45-58 |
| DOI | 10.4028/www.scientific.net/SSP.1-2.45 |
| Authors | Lih Juann Chen, C.W. Nieh, Chih Hsing Chu |
| Full Paper | 
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