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Structure of Radiation Damage in Germanium Induced by Te+-Implantation Near Channeling Conditions

Journal Solid State Phenomena (Volumes 1 - 2)
Volume Ion Implantation in Semiconductors
Edited by D. Stievenard and J.C. Bourgoin
Pages 465-473
DOI 10.4028/www.scientific.net/SSP.1-2.465
Citation M.G. Kalitzova et al., 1991, Solid State Phenomena, 1-2, 465
Authors M.G. Kalitzova, D.S. Karpuzov, N.K. Pashov
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