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EBIC-Investigation of the Dislocation-Impurity Interaction in Silicon

Journal Solid State Phenomena (Volumes 1 - 2)
Volume Ion Implantation in Semiconductors
Edited by D. Stievenard and J.C. Bourgoin
Pages 59-63
DOI 10.4028/www.scientific.net/SSP.1-2.59
Citation I.E. Bondarenko et al., 1991, Solid State Phenomena, 1-2, 59
Authors I.E. Bondarenko, Eugene B. Yakimov
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