Paper Title:
Dopant Anomalous Diffusion Induced in Silicon by Ion Implantation
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 1-2)
Edited by
D. Stievenard and J.C. Bourgoin
Pages
65-83
DOI
10.4028/www.scientific.net/SSP.1-2.65
Citation
S. Solmi, M. Servidori, "Dopant Anomalous Diffusion Induced in Silicon by Ion Implantation", Solid State Phenomena, Vols. 1-2, pp. 65-83, 1988
Online since
January 1991
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Price
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