Main Theme:

Ultra Clean Processing of Silicon Surfaces VII

Volumes 103 - 104
doi: 10.4028/www.scientific.net/SSP.103-104
Paper Titles published in this Main Theme:
Paper Title Page

Preface, Committees

High-k Gate Dielectrics on Silicon and Germanium: Impact of Surface Preparation

Authors: Alessio Beverina, M.M. Frank, H. Shang, S. Rivillon, F. Amy, C.L. Hsueh, V.K. Paruchuri, R.T. Mo, M. Copel, E.P. Gusev, M.A. Gribelyuk, Y.J. Chabal

3

UV Activated Surface Preparation of Silicon for High-k Dielectric Deposition

Authors: Casey C. Finstad, Anthony Muscat

7

Enhanced Surface Preparation Techniques for the Si/High-k Interface

Authors: Joel Barnett, Chadwin D. Young, Naim Moumen, Gennadi Bersuker, Jeff J. Peterson, George A. Brown, Byoung Hun Lee, Howard R. Huff

11

Uniform Ultrathin Oxide Growth for High-k Preclean

Authors: Jeffery W. Butterbaugh, Steven L. Nelson, Thomas J. Wagener

15

On the Application of a Thin Ozone Based Wet Chemical Oxide as an Interface for ALD High-k Deposition

Authors: Bart Onsia, Matty Caymax, Thierry Conard, Stefan de Gendt, F. De Smedt, A. Delabie, C. Gottschalk, Marc M. Heyns, M. Green, S. Lin, Paul W. Mertens, W. Tsai, Chris Vinckier

19

Interface State Densities and Surface Charge on Wet-Chemically Prepared Si(100) Surfaces

Authors: Heike Angermann

23

A Study of the Influence of Typical Wet Chemical Treatments on the Germanium Wafer Surface

Authors: Bart Onsia, Thierry Conard, Stefan de Gendt, Marc M. Heyns, I. Hoflijk, Paul W. Mertens, Marc Meuris, G. Raskin, Sonja Sioncke, I. Teerlinck, Antoon Theuwis, Jan Van Steenbergen, Chris Vinckier

27

Surface Preparation Techniques for High-k Deposition on Ge Substrates

Authors: Sven Van Elshocht, A. Delabie, B. Brijs, Matty Caymax, Thierry Conard, Bart Onsia, Riikka Puurunen, Olivier Richard, Jan Van Steenbergen, Chao Zhao, Marc Meuris, Marc M. Heyns

31

Advanced Surface Cleaning Strategy for 65nm CMOS Device Performance Enhancement

Authors: F. Arnaud, H. Bernard, Alessio Beverina, R. El-Farhane, B. Duriez, Kathy Barla, Didier Lévy

37

Showing 1 to 10 of 87 Paper Titles