Paper Title:
Selective Si3N4 Etch in Single Wafer Application
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 103-104)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
103-106
DOI
10.4028/www.scientific.net/SSP.103-104.103
Citation
D. M. Knotter, N. Stewart, I. Sharp, "Selective Si3N4 Etch in Single Wafer Application", Solid State Phenomena, Vols. 103-104, pp. 103-106, 2005
Online since
April 2005
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Price
$32.00
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