Paper Title:
Enhanced Surface Preparation Techniques for the Si/High-k Interface
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 103-104)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
11-14
DOI
10.4028/www.scientific.net/SSP.103-104.11
Citation
J. Barnett, C. D. Young, N. Moumen, G. Bersuker, J. J. Peterson, G. A. Brown, B. H. Lee, H. R. Huff, "Enhanced Surface Preparation Techniques for the Si/High-k Interface", Solid State Phenomena, Vols. 103-104, pp. 11-14, 2005
Online since
April 2005
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Price
$32.00
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