Enhanced Surface Preparation Techniques for the Si/High-k Interface |
| Journal |
Solid State Phenomena (Volumes 103 - 104) |
| Volume |
Ultra Clean Processing of Silicon Surfaces VII |
| Edited by |
Paul Mertens, Marc Meuris and Marc Heyns |
| Pages |
11-14 |
| DOI |
10.4028/www.scientific.net/SSP.103-104.11 |
| Online since |
April, 2005 |
| Authors |
Joel Barnett,
Chadwin D. Young,
Naim Moumen,
Gennadi Bersuker,
Jeff J. Peterson,
George A. Brown,
Byoung Hun Lee,
Howard R. Huff
|
| Keywords |
Charge Trapping, High-k, Interfaces |
| Full Paper |
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