Paper Title:
Novel Chemical Etching to Correct Film Thickness Distributions
  Abstract

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Periodical
Solid State Phenomena (Volumes 103-104)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
111-114
DOI
10.4028/www.scientific.net/SSP.103-104.111
Citation
H. Ugajin, H. Iwamoto, K. Kinoshita, "Novel Chemical Etching to Correct Film Thickness Distributions", Solid State Phenomena, Vols. 103-104, pp. 111-114, 2005
Online since
April 2005
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