Paper Title:
Challenges of Finer Particle Detection on Bulk-Silicon and SOI Wafers
  Abstract

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Periodical
Solid State Phenomena (Volumes 103-104)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
121-128
DOI
10.4028/www.scientific.net/SSP.103-104.121
Citation
T. Hattori, A. Okamoto, H. Kuniyasu, "Challenges of Finer Particle Detection on Bulk-Silicon and SOI Wafers", Solid State Phenomena, Vols. 103-104, pp. 121-128, 2005
Online since
April 2005
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$32.00
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