Paper Title:
The Impact of Backside Particles on the Limits of Optical Lithography
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 103-104)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
129-132
DOI
10.4028/www.scientific.net/SSP.103-104.129
Citation
T. Bearda, P. W. Mertens, F. Holsteyns, P. De Bisschop, R. Compen, A. van Meer, M. M. Heyns, "The Impact of Backside Particles on the Limits of Optical Lithography", Solid State Phenomena, Vols. 103-104, pp. 129-132, 2005
Online since
April 2005
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