Paper Title:
Inspection Challenges at the 45nm Technology Node
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 103-104)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
133-136
DOI
10.4028/www.scientific.net/SSP.103-104.133
Citation
D. Shortt, L. Cheung, "Inspection Challenges at the 45nm Technology Node", Solid State Phenomena, Vols. 103-104, pp. 133-136, 2005
Online since
April 2005
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