Paper Title:
Metrology and Removal of Nanoparticles from 500 Micron Deep Trenches
  Abstract

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Periodical
Solid State Phenomena (Volumes 103-104)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
137-140
DOI
10.4028/www.scientific.net/SSP.103-104.137
Citation
O. Guldiken, K. Bakhtari, A. A. Busnaina, J. Park, "Metrology and Removal of Nanoparticles from 500 Micron Deep Trenches", Solid State Phenomena, Vols. 103-104, pp. 137-140, 2005
Online since
April 2005
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