Paper Title:
Uniform Ultrathin Oxide Growth for High-k Preclean
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 103-104)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
15-18
DOI
10.4028/www.scientific.net/SSP.103-104.15
Citation
J. W. Butterbaugh, S. L. Nelson, T. J. Wagener, "Uniform Ultrathin Oxide Growth for High-k Preclean", Solid State Phenomena, Vols. 103-104, pp. 15-18, 2005
Online since
April 2005
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Price
$32.00
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