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Uniform Ultrathin Oxide Growth for High-k Preclean

Journal Solid State Phenomena (Volumes 103 - 104)
Volume Ultra Clean Processing of Silicon Surfaces VII
Edited by Paul Mertens, Marc Meuris and Marc Heyns
Pages 15-18
DOI 10.4028/www.scientific.net/SSP.103-104.15
Online since April, 2005
Authors Jeffery W. Butterbaugh, Steven L. Nelson, Thomas J. Wagener
Keywords High-k, Oxide Growth, Ozonated Water, Ozone
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