Paper Title:
Behaviour of a Well-Designed Megasonic Cleaning System
  Abstract

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Periodical
Solid State Phenomena (Volumes 103-104)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
155-158
DOI
10.4028/www.scientific.net/SSP.103-104.155
Citation
A. Lippert, P. Engesser, G. Ferrell, J. Klitzke, M. Köffler, F. Kumnig, J. Leberzammer, R. Obweger, A. Pfeuffer, H. Okorn-Schmidt, H. Sax, "Behaviour of a Well-Designed Megasonic Cleaning System", Solid State Phenomena, Vols. 103-104, pp. 155-158, 2005
Online since
April 2005
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