Paper Title:
A Comparison of Particle Filtration in a Recirculated Wet Bench Wet Cleaning Tool: Performance of PTFE Filters and of Surface Optimized Filters
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Periodical
Solid State Phenomena (Volumes 103-104)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
171-176
DOI
10.4028/www.scientific.net/SSP.103-104.171
Citation
G. Haas, B. Parekh, J. Frankhauser, B. Viallet, P. Palka, J. Bras, "A Comparison of Particle Filtration in a Recirculated Wet Bench Wet Cleaning Tool: Performance of PTFE Filters and of Surface Optimized Filters", Solid State Phenomena, Vols. 103-104, pp. 171-176, 2005
Online since
April 2005
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