Paper Title:
Non-Damaging CO2 Aerosol Cleaning in FEOL IC Manufacturing
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 103-104)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
199-202
DOI
10.4028/www.scientific.net/SSP.103-104.199
Citation
S. Banerjee, A. Campbell, "Non-Damaging CO2 Aerosol Cleaning in FEOL IC Manufacturing", Solid State Phenomena, Vols. 103-104, pp. 199-202, 2005
Online since
April 2005
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$32.00
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