Paper Title:
VPD-DC-TXRF for Metallic Contamination Analysis of Ge Wafers
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 103-104)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
213-216
DOI
10.4028/www.scientific.net/SSP.103-104.213
Citation
D. Hellin, V. Geens, I. Teerlinck, J. Van Steenbergen, J. Rip, W. Laureyn, G. Raskin, P. W. Mertens, S. De Gendt, C. Vinckier, "VPD-DC-TXRF for Metallic Contamination Analysis of Ge Wafers", Solid State Phenomena, Vols. 103-104, pp. 213-216, 2005
Online since
April 2005
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$32.00
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