Application of HPLC for the Analysis of Organic Additives in Cleaning Chemicals and Cleaning Mixtures |
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| Journal | Solid State Phenomena (Volumes 103 - 104) |
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| Volume | Ultra Clean Processing of Silicon Surfaces VII |
| Edited by | Paul Mertens, Marc Meuris and Marc Heyns |
| Pages | 221-226 |
| DOI | 10.4028/www.scientific.net/SSP.103-104.221 |
| Citation | S. Metzger et al., 2005, Solid State Phenomena, 103-104, 221 |
| Online since | April, 2005 |
| Authors | S. Metzger, Bernd O. Kolbesen |
| Keywords | Complexing Agent Decomposition, HPLC-MS, MS/MS, Single Chemistry Cleaning |
| Abstract | The suitability of high performance liquid chromatography (HPLC) for the direct determination of the concentration of complexing agents for single chemistry cleaning is demonstrated. HPLC, coupled to a mass spectrometric detector (HPLC-MS) and two-dimensional mass spectrometry (MS/MS) have been applied for the investigation of the reactions involved in the decomposition of the complexing agents. The techniques described are useful for determining the stability of organic additives in wet chemical cleaning baths. |
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