Interface State Densities and Surface Charge on Wet-Chemically Prepared Si(100) Surfaces |
| Journal |
Solid State Phenomena (Volumes 103 - 104) |
| Volume |
Ultra Clean Processing of Silicon Surfaces VII |
| Edited by |
Paul Mertens, Marc Meuris and Marc Heyns |
| Pages |
23-26 |
| DOI |
10.4028/www.scientific.net/SSP.103-104.23 |
| Citation |
H. Angermann, 2005, Solid State Phenomena, 103-104, 23 |
| Online since |
April, 2005 |
| Authors |
H. Angermann |
| Keywords |
Hydrogen-Termination, Native Oxidation, Silicon Surfaces, Spectroscopic Ellipsometry (SE), Surface Photo Voltage (SPV), Wet Chemical Cleaning |
| Full Paper |
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