Interface State Densities and Surface Charge on Wet-Chemically Prepared Si(100) Surfaces |
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| Journal | Solid State Phenomena (Volumes 103 - 104) |
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| Volume | Ultra Clean Processing of Silicon Surfaces VII |
| Edited by | Paul Mertens, Marc Meuris and Marc Heyns |
| Pages | 23-26 |
| DOI | 10.4028/www.scientific.net/SSP.103-104.23 |
| Online since | April, 2005 |
| Authors | H. Angermann |
| Keywords | Hydrogen-Termination, Native Oxidation, Silicon Surfaces, Spectroscopic Ellipsometry (SE), Surface Photo Voltage (SPV), Wet Chemical Cleaning |
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