Paper Title:
Prevention of Copper Cross-Contamination on Cu Process and Non-Cu Process Mixed Fabrication
  Abstract

When the integration of Cu process and non-Cu process is mixed in the fabrication, the prevention of Cu cross-contamination between wafer-to-wafer and machine-to-machine is critical. This study suggests a prevention method of the cross-contamination in Cu fabrication line.

  Info
Periodical
Solid State Phenomena (Volumes 103-104)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
237-240
DOI
10.4028/www.scientific.net/SSP.103-104.237
Citation
J. B. Shim, K. H. Lee, K. H. Kim, H. S. Park, "Prevention of Copper Cross-Contamination on Cu Process and Non-Cu Process Mixed Fabrication", Solid State Phenomena, Vols. 103-104, pp. 237-240, 2005
Online since
April 2005
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