Paper Title:
Direct Mixing Cleaning Method of Aqua Regia on Wafer
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 103-104)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
245-248
DOI
10.4028/www.scientific.net/SSP.103-104.245
Citation
H. Ugajin, H. Iwamoto, K. Kinoshita, "Direct Mixing Cleaning Method of Aqua Regia on Wafer", Solid State Phenomena, Vols. 103-104, pp. 245-248, 2005
Online since
April 2005
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Price
$32.00
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