Paper Title:
The Degradation Prevention of Resin Materials for Semiconductor Manufacturing Equipment by Applying the Ultra-High Purity Gas Supply Technology
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Periodical
Solid State Phenomena (Volumes 103-104)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
255-258
DOI
10.4028/www.scientific.net/SSP.103-104.255
Citation
A. Hidaka, S. Yamashita, N. Tanahashi, H. Ishii, M. Kitano, Y. Shirai, T. Ohmi, "The Degradation Prevention of Resin Materials for Semiconductor Manufacturing Equipment by Applying the Ultra-High Purity Gas Supply Technology", Solid State Phenomena, Vols. 103-104, pp. 255-258, 2005
Online since
April 2005
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