Paper Title:

Purification of Trace Amount of Metal Impurity from Ultra Pure Water Using Membrane Purifier/Filter

Periodical Solid State Phenomena (Volumes 103 - 104)
Main Theme Ultra Clean Processing of Silicon Surfaces VII
Edited by Paul Mertens, Marc Meuris and Marc Heyns
Pages 265-268
DOI 10.4028/www.scientific.net/SSP.103-104.265
Citation Yukio Hashimoto et al., 2005, Solid State Phenomena, 103-104, 265
Online since April 2005
Authors Yukio Hashimoto, Mutsuhiro Amari, Makoto Komatsu, Kunio Fujiwara
Keywords Filter, Metal, Purifier, Ultra Pure Water
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