A Force Study in Brush Scrubbing |
| Journal |
Solid State Phenomena (Volumes 103 - 104) |
| Volume |
Ultra Clean Processing of Silicon Surfaces VII |
| Edited by |
Paul Mertens, Marc Meuris and Marc Heyns |
| Pages |
279-282 |
| DOI |
10.4028/www.scientific.net/SSP.103-104.279 |
| Citation |
Kai Dong Xu et al., 2005, Solid State Phenomena, 103-104, 279 |
| Online since |
April, 2005 |
| Authors |
Kai Dong Xu, Rita Vos, Guy Vereecke, G. Doumen, Wim Fyen, Paul W. Mertens, Marc M. Heyns, Chris Vinckier, Jan Fransaer |
| Keywords |
Brush Scrubbing, Cleaning Mechanisms, Forces, Lifting, Moments, Rolling |
| Full Paper |
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