Paper Title:
Resist Stripping for Advanced FEOL Nodes: Improvements to Process Based on Ozone Diffusion by Use of Additives
  Abstract

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Periodical
Solid State Phenomena (Volumes 103-104)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
301-304
DOI
10.4028/www.scientific.net/SSP.103-104.301
Citation
O. Louveau, E. Lajoinie, O. Pollet, J. P. Odet, S. Cêtre, L. Lachal, B. Icard, E. Tabouret, M. Veillerot, H. Fontaine, D. Louis, "Resist Stripping for Advanced FEOL Nodes: Improvements to Process Based on Ozone Diffusion by Use of Additives", Solid State Phenomena, Vols. 103-104, pp. 301-304, 2005
Online since
April 2005
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