Paper Title:
Photoresist Stripping by Ozone/Water Processes: Effect of Additives
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 103-104)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
309-314
DOI
10.4028/www.scientific.net/SSP.103-104.309
Citation
H. Vankerckhoven, F. De Smedt, K. Vandersmissen, M. Claes, S. De Gendt, M. M. Heyns, C. Vinckier, "Photoresist Stripping by Ozone/Water Processes: Effect of Additives", Solid State Phenomena, Vols. 103-104, pp. 309-314, 2005
Online since
April 2005
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Lei Yuan, Ji Min Shen, Zhong Lin Chen
Abstract:The kinetics of pumice for decomposition of p-chloronitrobenzene (pCNB) in aqueous solution were investigate. The experiment result indicated...
2925
Authors: Ying Jie Zhang, Xia Liao, Shu Fen Xu, Da Peng Li, Qing Hu
Chapter 1: Material Science
Abstract:A new heterogeneous catalyst Fe-Mn/GAC (iron and manganese were loaded into activated carbon particles) was prepared, which had a better...
490
Authors: Jian Zhong Jin
Chapter 2: Catalyst and Catalytic Reaction
Abstract:A series of solid acid catalysts were synthesized by incipient wetness impregnation method by varying the wt% of silicotungstic acid on...
362
Authors: Ya Na Liu, Hui Tian, An Heng Si
Chapter 8: Waste Disposal and Recycling
Abstract:Ultraviolet ozone process was used to eliminate Methyl Violet, the effects of the type of research process, the initial solution pH, dye...
3208
Authors: Ye Jian Qian, Zhi Fang Chen, Wei Huang, Tian Wei Zhen
Chapter 2: Applied Mechanics, Mechanical Engineering and Fuel
Abstract:Butanol has been considered an attractive alternative fuel for automotive engine. In the present study, a numerical study is conducted in a...
283