Paper Title:
Surface Preparation Techniques for High-k Deposition on Ge Substrates
  Abstract

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Periodical
Solid State Phenomena (Volumes 103-104)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
31-36
DOI
10.4028/www.scientific.net/SSP.103-104.31
Citation
S. Van Elshocht, A. Delabie, B. Brijs, M. Caymax, T. Conard, B. Onsia, R. Puurunen, O. Richard, J. Van Steenbergen, C. Zhao, M. Meuris, M. M. Heyns, "Surface Preparation Techniques for High-k Deposition on Ge Substrates", Solid State Phenomena, Vols. 103-104, pp. 31-36, 2005
Online since
April 2005
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