Paper Title:
Supercritical CO2 Applications in BEOL Cleaning
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 103-104)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
315-322
DOI
10.4028/www.scientific.net/SSP.103-104.315
Citation
P.D. Matz, R.F. Reidy, "Supercritical CO2 Applications in BEOL Cleaning", Solid State Phenomena, Vols. 103-104, pp. 315-322, 2005
Online since
April 2005
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Price
$32.00
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