Paper Title:
Copper Decontamination Ability of Supercritical-CO2/Additives on CVD and Spin-On Porous MSQ Materials
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Periodical
Solid State Phenomena (Volumes 103-104)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
327-330
DOI
10.4028/www.scientific.net/SSP.103-104.327
Citation
J. Daviot, V. Perrut, F. Gaillard, C. Millet, A. Danel, L. Broussous, D. Louis, "Copper Decontamination Ability of Supercritical-CO2/Additives on CVD and Spin-On Porous MSQ Materials", Solid State Phenomena, Vols. 103-104, pp. 327-330, 2005
Online since
April 2005
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