Paper Title:
Angled XPS Analysis of Low-k Dielectric Surfaces after Cleaning
  Abstract

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Periodical
Solid State Phenomena (Volumes 103-104)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
331-336
DOI
10.4028/www.scientific.net/SSP.103-104.331
Citation
Y.S. Tan, S. Y.M. Chooi, C.-Y. Sin, P.-Y. Ee, M.P. Srinivasan, S. O. Pehkonen, "Angled XPS Analysis of Low-k Dielectric Surfaces after Cleaning", Solid State Phenomena, Vols. 103-104, pp. 331-336, 2005
Online since
April 2005
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Price
$32.00
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