Paper Title:
Impact of Downstream Ash Plasmas on Ultra Low-k Materials
  Abstract

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Periodical
Solid State Phenomena (Volumes 103-104)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
337-340
DOI
10.4028/www.scientific.net/SSP.103-104.337
Citation
N. Possémé, T. David, P. Meininger, O. Louveau, T. Chevolleau, O. Joubert, D. Louis, "Impact of Downstream Ash Plasmas on Ultra Low-k Materials", Solid State Phenomena, Vols. 103-104, pp. 337-340, 2005
Online since
April 2005
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Price
$32.00
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