Paper Title:
Activated He:H2 Strip of Photoresist over Porous Low-k Materials
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Periodical
Solid State Phenomena (Volumes 103-104)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
341-344
DOI
10.4028/www.scientific.net/SSP.103-104.341
Citation
Q. Y. Han, B. White, I. L. Berry, C. Waldfried, O. Escorcia, "Activated He:H2 Strip of Photoresist over Porous Low-k Materials", Solid State Phenomena, Vols. 103-104, pp. 341-344, 2005
Online since
April 2005
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