Paper Title:
Deposition Behavior of Volatile Acidic Contaminants on Metallic Interconnect Surfaces
  Abstract

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Periodical
Solid State Phenomena (Volumes 103-104)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
365-368
DOI
10.4028/www.scientific.net/SSP.103-104.365
Citation
H. Fontaine, M. Veillerot, A. Danel, "Deposition Behavior of Volatile Acidic Contaminants on Metallic Interconnect Surfaces", Solid State Phenomena, Vols. 103-104, pp. 365-368, 2005
Online since
April 2005
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Price
$32.00
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