Paper Title:
Advanced Aqueous Cleaner I, Dilute Solutions for the Selective Removal of Post Etch Residues in the Presence of Aluminium
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 103-104)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
377-380
DOI
10.4028/www.scientific.net/SSP.103-104.377
Citation
J. Daviot, C. Reid, D. Holmes, "Advanced Aqueous Cleaner I, Dilute Solutions for the Selective Removal of Post Etch Residues in the Presence of Aluminium", Solid State Phenomena, Vols. 103-104, pp. 377-380, 2005
Online since
April 2005
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Price
$32.00
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