Advanced Aqueous Cleaner I, Dilute Solutions for the Selective Removal of Post Etch Residues in the Presence of Aluminium |
| Journal |
Solid State Phenomena (Volumes 103 - 104) |
| Volume |
Ultra Clean Processing of Silicon Surfaces VII |
| Edited by |
Paul Mertens, Marc Meuris and Marc Heyns |
| Pages |
377-380 |
| DOI |
10.4028/www.scientific.net/SSP.103-104.377 |
| Citation |
Jerome Daviot et al., 2005, Solid State Phenomena, 103-104, 377 |
| Online since |
April, 2005 |
| Authors |
Jerome Daviot, Chris Reid, Douglas Holmes |
| Keywords |
Advanced Aqueous Cleaner AACTM, Al BEOL, PER Cleaning |
| Full Paper |
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