Effective Polymer Removal: Process Window-Process Uniformity-Extended Chemical Bath-Life |
| Journal |
Solid State Phenomena (Volumes 103 - 104) |
| Volume |
Ultra Clean Processing of Silicon Surfaces VII |
| Edited by |
Paul Mertens, Marc Meuris and Marc Heyns |
| Pages |
385-0 |
| DOI |
10.4028/www.scientific.net/SSP.103-104.385 |
| Citation |
Chuan Yew-Leong et al., 2005, Solid State Phenomena, 103-104, 385 |
| Online since |
April, 2005 |
| Authors |
Chuan Yew-Leong, Wee Boon-Lim, Wayne A-Cady, Nik A-Mustapha, Kah Keen-Lai |
| Keywords |
ALEGTM-310 Stripper, Define-Measure-Analysis-Implement-Control DMAIC, Water Spiking |
| Full Paper |
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