Process, Environmental & Economical Considerations to Implement Single Wafer Cleaning Tools in 300mm Wafer Fabs |
| Journal |
Solid State Phenomena (Volumes 103 - 104) |
| Volume |
Ultra Clean Processing of Silicon Surfaces VII |
| Edited by |
Paul Mertens, Marc Meuris and Marc Heyns |
| Pages |
41-44 |
| DOI |
10.4028/www.scientific.net/SSP.103-104.41 |
| Online since |
April, 2005 |
| Authors |
Philippe Garnier,
G. Horellou,
J.J. Calvier,
D. Labaty,
Didier Lévy
|
| Keywords |
Cost of Ownership, Cycle Time, DIW Consumption, Environment, Single Wafer Cleaning |
| Full Paper |
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