Paper Title:
Process, Environmental & Economical Considerations to Implement Single Wafer Cleaning Tools in 300mm Wafer Fabs
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Periodical
Solid State Phenomena (Volumes 103-104)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
41-44
DOI
10.4028/www.scientific.net/SSP.103-104.41
Citation
P. Garnier, G. Horellou, J.J. Calvier, D. Labaty, D. Lévy, "Process, Environmental & Economical Considerations to Implement Single Wafer Cleaning Tools in 300mm Wafer Fabs", Solid State Phenomena, Vols. 103-104, pp. 41-44, 2005
Online since
April 2005
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