Process, Environmental & Economical Considerations to Implement Single Wafer Cleaning Tools in 300mm Wafer Fabs |
| Journal |
Solid State Phenomena (Volumes 103 - 104) |
| Volume |
Ultra Clean Processing of Silicon Surfaces VII |
| Edited by |
Paul Mertens, Marc Meuris and Marc Heyns |
| Pages |
41-44 |
| DOI |
10.4028/www.scientific.net/SSP.103-104.41 |
| Citation |
Philippe Garnier et al., 2005, Solid State Phenomena, 103-104, 41 |
| Online since |
April, 2005 |
| Authors |
Philippe Garnier, G. Horellou, J.J. Calvier, D. Labaty, Didier Lévy |
| Keywords |
Cost of Ownership, Cycle Time, DIW Consumption, Environment, Single Wafer Cleaning |
| Full Paper |
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