Application of UV/VIS-Spectroscopy for Determination of Complexing Agent Stability in APM and Like Mixtures Thereof |
| Journal |
Solid State Phenomena (Volumes 103 - 104) |
| Volume |
Ultra Clean Processing of Silicon Surfaces VII |
| Edited by |
Paul Mertens, Marc Meuris and Marc Heyns |
| Pages |
55-58 |
| DOI |
10.4028/www.scientific.net/SSP.103-104.55 |
| Citation |
O. Doll et al., 2005, Solid State Phenomena, 103-104, 55 |
| Online since |
April, 2005 |
| Authors |
O. Doll, Bernd O. Kolbesen |
| Keywords |
APM, APM+TM, Choline, Complexing Agent, Stability, TMAH, UV/VIS-Spectroscopy |
| Full Paper |
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