Plasma Cleaning for W Polymetal Gate |
| Journal |
Solid State Phenomena (Volumes 103 - 104) |
| Volume |
Ultra Clean Processing of Silicon Surfaces VII |
| Edited by |
Paul Mertens, Marc Meuris and Marc Heyns |
| Pages |
59-62 |
| DOI |
10.4028/www.scientific.net/SSP.103-104.59 |
| Citation |
Alex Kabansky et al., 2005, Solid State Phenomena, 103-104, 59 |
| Online since |
April, 2005 |
| Authors |
Alex Kabansky, Harry Lee |
| Keywords |
Defect, Energy Dispersive X-Ray (EDX), Plasma Cleaning, Polymetal Gate, Residual Film, Selective Oxidation, TEM |
| Full Paper |
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