Paper Title:
Plasma Cleaning for W Polymetal Gate
  Abstract

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Periodical
Solid State Phenomena (Volumes 103-104)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
59-62
DOI
10.4028/www.scientific.net/SSP.103-104.59
Citation
A. Kabansky, H. Lee, "Plasma Cleaning for W Polymetal Gate", Solid State Phenomena, Vols. 103-104, pp. 59-62, 2005
Online since
April 2005
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