Paper Title:
Development of New Batch-Type Plasma Assisted NOR (Native-Oxide-Removal) Dry Cleaning Equipment
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Periodical
Solid State Phenomena (Volumes 103-104)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
63-66
DOI
10.4028/www.scientific.net/SSP.103-104.63
Citation
W. S. Kim, W. G. Hwang, I.-K. Kim, K.-Y. Yun, K. M. Lee, S. K. Chae, "Development of New Batch-Type Plasma Assisted NOR (Native-Oxide-Removal) Dry Cleaning Equipment", Solid State Phenomena, Vols. 103-104, pp. 63-66, 2005
Online since
April 2005
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