Development of New Batch-Type Plasma Assisted NOR (Native-Oxide-Removal) Dry Cleaning Equipment |
| Journal |
Solid State Phenomena (Volumes 103 - 104) |
| Volume |
Ultra Clean Processing of Silicon Surfaces VII |
| Edited by |
Paul Mertens, Marc Meuris and Marc Heyns |
| Pages |
63-66 |
| DOI |
10.4028/www.scientific.net/SSP.103-104.63 |
| Citation |
Wan Sik Kim et al., 2005, Solid State Phenomena, 103-104, 63 |
| Online since |
April, 2005 |
| Authors |
Wan Sik Kim, Wan Goo Hwang, Il-Kyoung Kim, Ki-Young Yun, Kwang Myung Lee, Seung Ki Chae |
| Keywords |
Batch-Type Process, Dry Cleaning, Native Oxide Removal NOR |
| Full Paper |
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