Paper Title:
Effective Rinse Aiming at Water-Mark-Free Drying for Single-Spin Wet Cleaning Process
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Periodical
Solid State Phenomena (Volumes 103-104)
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
79-82
DOI
10.4028/www.scientific.net/SSP.103-104.79
Citation
K. Miya, T. Kishimoto, A. Izumi, "Effective Rinse Aiming at Water-Mark-Free Drying for Single-Spin Wet Cleaning Process", Solid State Phenomena, Vols. 103-104, pp. 79-82, 2005
Online since
April 2005
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