Paper Title
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Authors: Hiromitsu Namba, Takehiko Orii, Hiroki Ohno, Glenn W. Gale
83
Authors: Felicia Goh, Christopher Lim, Vincent Sih, Zainab Ismail, Simon Y.M. Chooi
Abstract:Arsenic based defects were found on the surfaces of advanced CMOS patterned wafers after the pre-silicidation HF clean. Investigations into...
87
Authors: Martine Claes, Vasile Paraschiv, S. Beckx, M. Demand, W. Deweerd, Sylvain Garaud, H. Kraus, Rita Vos, James Snow, Werner Boullart, Stefan De Gendt
93
Authors: Vasile Paraschiv, Martine Claes, Mikhail R. Baklanov, Werner Boullart, Stefan De Gendt, Serge Vanhaelemeersch
97
Authors: D. Martin Knotter, Nigel Stewart, Ian Sharp
103
Authors: Enrico Bellandi, Alice C. Elbaz, Rosella Piagge, Francesco Pipia, Mauro Alessandri
107
Authors: Hajime Ugajin, Hayato Iwamoto, Kei Kinoshita
111
Authors: Koichiro Saga, Hitoshi Kuniyasu, Takeshi Hattori, Kenji Yamada, Tomoyuki Azuma
115
Authors: Takeshi Hattori, Akira Okamoto, Hitoshi Kuniyasu
121
Authors: Twan Bearda, Paul W. Mertens, Frank Holsteyns, Peter De Bisschop, René Compen, Aschwin van Meer, Marc M. Heyns
129
Showing 21 to 30 of 87 Paper Titles