Paper Title
Page
Authors: David Shortt, Lisa Cheung
133
Authors: O. Guldiken, K. Bakhtari, Ahmed A. Busnaina, J. Park
137
Authors: Guy Vereecke, Frank Holsteyns, Sophia Arnauts, S. Beckx, P. Jaenen, Karine Kenis, M. Lismont, Marcel Lux, Rita Vos, James Snow, Paul W. Mertens
Abstract:Cleaning of nanoparticles (< 50nm ) is becoming a major challenge in semiconductor manufacturing and the future use of traditional methods,...
141
Authors: Kurt K. Christenson
147
Authors: Steven Verhaverbeke, Roman Gouk, Dennis Yost
151
Authors: Alexander Lippert, P. Engesser, Garry Ferrell, J. Klitzke, Martin Köffler, Franz Kumnig, Jörg Leberzammer, Alexander Pfeuffer, Rainer Obweger, Harry Sax, Harald Okorn-Schmidt
155
Authors: Frank Holsteyns, Kun Tack Lee, Sabine Graf, Roger Palmans, Guy Vereecke, Paul W. Mertens
159
Authors: Alexander Pfeuffer, Wolfgang Bensch, Alfred Lechner, Harald Okorn-Schmidt
Abstract:In this paper we report on a new method of controlling the zeta potential of Si3N4 particles by addition of silicate traces to neutral ultra...
163
Authors: J.J. Rosato, M.R. Yalamanchili, M.J. Beck, R.Y. Lillard
167
Authors: Günter Haas, Bipin Parekh, Jeremie Frankhauser, Benoît Viallet, Patrick Palka, Jérôme Bras
171
Showing 31 to 40 of 87 Paper Titles