Paper Title:
Texture Analysis of CVD Free-Standing Diamond Films
  Abstract

The crystallographic textures of the free-standing diamond films which were synthesized by the chemical vapor deposition (CVD) using a CH4/H2/Ar gas mixtures have been investigated. Texture components of the diamond films are analyzed with pole figures and orientation distribution function (ODF). The surface morphology of the diamond films grown at different substrate temperatures as well as different gas concentrations is observed with scanning electron microscopy (SEM). The experimental results indicate that the intensity of {110} fibre texture becomes much higher with the increase of the substrate temperature. It is considered that the higher multiplicity of <110> crystallographic direction in diamond octahedron leads to the higher appearance possibility of {110} fibre texture and the final texture components of the diamond films depend upon the CVD deposition parameters.

  Info
Periodical
Solid State Phenomena (Volume 105)
Edited by
C. Esling, M. Humbert, R.A. Schwarzer and F. Wagner
Pages
421-426
DOI
10.4028/www.scientific.net/SSP.105.421
Citation
L. Chen, H.P. Feng, F. X. Lu, "Texture Analysis of CVD Free-Standing Diamond Films", Solid State Phenomena, Vol. 105, pp. 421-426, 2005
Online since
July 2005
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Price
$32.00
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