Paper Title:
Thermal Stability of Nanoscale Multilayered ZrAlN/ZrB2 Coatings
  Abstract

Multilayered ZrAlN/ZrB2 coatings were synthesized using a multi-cathode dc magnetron sputtering technique. Effects of substrate bias and N2 gas partial pressure on structural, mechanical properties, as well as thermal stability were investigated. Low bias was beneficial to synthesis of nanolayers with weak internal stress. The nanolayers deposited at lower N2 partial pressure and substrate bias exhibited good high-temperature stability in the crystalline and layer structure, and hardness values were increased significantly after high-temperature annealing.

  Info
Periodical
Solid State Phenomena (Volume 107)
Main Theme
Edited by
T. Vilaithong, D. Boonyawan and C. Thongbai
Pages
137-140
DOI
10.4028/www.scientific.net/SSP.107.137
Citation
D.J. Li, J.J. Zhang, M. X. Wang, "Thermal Stability of Nanoscale Multilayered ZrAlN/ZrB2 Coatings", Solid State Phenomena, Vol. 107, pp. 137-140, 2005
Online since
October 2005
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