Main Theme:

Gettering and Defect Engineering in Semiconductor Technology XI

Volumes 108 - 109
doi: 10.4028/www.scientific.net/SSP.108-109
Paper Titles published in this Main Theme:
Paper Title Page

Committees

4

Preface

5

Intrinsic Point Defects in Silicon: a Unified View from Crystal Growth, Wafer Processing and Metal Diffusion

Authors: Vladimir V. Voronkov, Robert J. Falster

1

Precipitation Enhancement of "so Called" Defect-Free Czochralski Silicon Material

Authors: Timo Müller, G. Kissinger, P. Krottenthaler, C. Seuring, R. Wahlich, Wilfried von Ammon

11

Oxygen Precipitation in Nitrogen Doped CZ Silicon

Authors: G. Kissinger, Timo Müller, Andreas Sattler, W. Häckl, M. Weber, U. Lambert, A. Huber, P. Krottenthaler, Hans Richter, Wilfried von Ammon

17

From Continuous to Quantized Charging Phenomena in Few Nanocrystals MOS Structures

Authors: G. Benassayag, M. Shalchian, Jeremie Grisolia, C. Bonafos, S.M. Atarodi, A. Claverie

25

Passivation of Ge Nanocrystals in SiO2

Authors: Jesper Skov Jensen, Tom P. Leervad Pedersen, Rui Pereira, Pia Bomholt, Jacques Chevallier, Ole Hansen, Arne Nylandsted Larsen, Brian Bech Nielsen

33

The Properties of Hydrostatically Strained Ge and Si Nanocrystals in Silicon Dioxide Matrix

Authors: Ida E. Tyschenko, A.B. Talochkin, E.N. Vandyshev, A.G. Cherkov, Andrzej Misiuk

39

Use of the Nitride to Reduce High-K Secondary Effects in Submicron MOSFETs

Authors: Y. Amhouche, K. Rais

45

Laser Assisted Formation on Nanocrystals in Plasma-Chemical Deposited SiNx Films

Authors: Sofia A. Arzhannikova, M.D. Efremov, Vladimir A. Volodin, G.N. Kamaev, D.V. Marin, S.A. Soldatenkov, V.S. Shevchuk, S.A. Kochubei, A.A. Popov, Yu. A. Minakov

53

Showing 1 to 10 of 129 Paper Titles