Paper Title:
Influence of Metal Contamination in the Measurement of p-Type Cz Silicon Wafer Lifetime and Impact on the Oxide Growth
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 108-109)
Edited by
B. Pichaud, A. Claverie, D. Alquier, H. Richter and M. Kittler
Pages
297-302
DOI
10.4028/www.scientific.net/SSP.108-109.297
Citation
C. Bigot, A. Danel, S. Thevenin, "Influence of Metal Contamination in the Measurement of p-Type Cz Silicon Wafer Lifetime and Impact on the Oxide Growth", Solid State Phenomena, Vols. 108-109, pp. 297-302, 2005
Online since
December 2005
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Price
$32.00
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