Paper Title:
DLTS Study on Deep Levels Formed in Plasma Hydrogenated and Subsequently Annealed Silicon
  Abstract

P-n junctions are created in p-type Czochralski silicon after a low temperature (270°C) hydrogen plasma exposure. This is attributed to the formation of hydrogen-related shallow donors. A deep level (E1) with an activation energy of about EC-0.12 eV is observed by DLTS measurement and assigned to a metastable state of the hydrogen-related shallow donors. At an annealing temperature of 340°C, the E1 centres disappear and oxygen thermal donors appear. The concentrations of the oxygen thermal donors are found typically to be 2-3 decades lower than that required for over-compensating the initial p-type doping and for contributing the excess free carriers.

  Info
Periodical
Solid State Phenomena (Volumes 108-109)
Edited by
B. Pichaud, A. Claverie, D. Alquier, H. Richter and M. Kittler
Pages
547-552
DOI
10.4028/www.scientific.net/SSP.108-109.547
Citation
Y. L. Huang, E. Simoen, C. Claeys, R. Job, Y. Ma, W. Düngen, W. R. Fahrner, J. Versluys, P. Clauws, "DLTS Study on Deep Levels Formed in Plasma Hydrogenated and Subsequently Annealed Silicon", Solid State Phenomena, Vols. 108-109, pp. 547-552, 2005
Online since
December 2005
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: N. Martsinovich, A.L. Rosa, M.I. Heggie, Patrick R. Briddon
Abstract:We use DFT calculations to investigate the problem of hydrogen aggregation in silicon. We study atomic structures of finite hydrogen...
81
Authors: S. Jayalakshmi, Eric Fleury, Ki Bae Kim
Abstract:Ti50Zr25Cu25 in-situ composite ribbons consisting of metastable β-Ti crystalline phase in an amorphous matrix was studied for its structural...
459
Authors: S. Alexandrova, A. Szekeres
Abstract:In the present paper we discuss the defects at the oxide/Si interface and the structure of silicon oxide films grown on plasma hydrogenated...
163
Authors: E. Vogli, Fabian Hoffmann, E. Bartis, G. S. Oehrlein, Wolfgang Tillmann
Chapter 20: Surface Engineering & Coatings
Abstract:It has been established that hardness and density of diamond-like carbon (DLC) layers can be raised by increasing ion energy during...
2596
Authors: Duraisamy Silambarasan, Velappa Jayaraman Surya, Veerapandy Vasu, Kombiah Iyakutti
III. Nanotubes and nanowires
Abstract:In this work, desorption of hydrogen from hydrogenated single walled carbon nanotubes (SWCNTs) functionalized with borane is discussed. A...
185