Paper Title:

Defect Behaviour in Deuterated and Non-Deuterated n-Type Si

Periodical Solid State Phenomena (Volumes 108 - 109)
Main Theme Gettering and Defect Engineering in Semiconductor Technology XI
Edited by B. Pichaud, A. Claverie, D. Alquier, H. Richter and M. Kittler
Pages 553-560
DOI 10.4028/www.scientific.net/SSP.108-109.553
Citation Jan H. Bleka et al., 2005, Solid State Phenomena, 108-109, 553
Online since December, 2005
Authors Jan H. Bleka, Edouard V. Monakhov, Alexander G. Ulyashin, F. Danie Auret, Andrej Yu. Kuznetsov, B.S. Avset, Bengt G. Svensson
Keywords Defect, Deuterium, DLTS, Hydrogen, Silicon
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