Paper Title:
Defect Behaviour in Deuterated and Non-Deuterated n-Type Si
| Periodical |
Solid State Phenomena (Volumes 108 - 109)
|
| Main Theme |
Gettering and Defect Engineering in Semiconductor Technology XI
|
| Edited by |
B. Pichaud, A. Claverie, D. Alquier, H. Richter and M. Kittler |
| Pages |
553-560 |
| DOI |
10.4028/www.scientific.net/SSP.108-109.553 |
| Citation |
Jan H. Bleka et al., 2005, Solid State Phenomena, 108-109, 553 |
| Online since |
December, 2005 |
| Authors |
Jan H. Bleka, Edouard V. Monakhov, Alexander G. Ulyashin, F. Danie Auret, Andrej Yu. Kuznetsov, B.S. Avset, Bengt G. Svensson |
| Keywords |
Defect, Deuterium, DLTS, Hydrogen, Silicon |
| Price |
US$ 28,- |