Paper Title:
Modification of Silicon Oxide by High Energy Electron Beam
  Abstract

During interaction between thin film SiO2 and electron beam with high power density, amorphous silicon dioxide modifies. Silicon nanoclusters are formed in radiated area. Result of this interaction is formation of Si/SiO2 nanocomposite. We studied modified SiO2 by TEM, microdiffraction and cathodoluminescence.

  Info
Periodical
Solid State Phenomena (Volumes 108-109)
Edited by
B. Pichaud, A. Claverie, D. Alquier, H. Richter and M. Kittler
Pages
729-734
DOI
10.4028/www.scientific.net/SSP.108-109.729
Citation
E.V. Kolesnikova, A. A. Sitnikova, V.I. Sokolov, M.V. Zamoryanskaya, "Modification of Silicon Oxide by High Energy Electron Beam", Solid State Phenomena, Vols. 108-109, pp. 729-734, 2005
Online since
December 2005
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